List Master wafer, method of manufacturing the same, and method of manufacturing optical device by using the same Authors Joonyong Park, Dongouk Kim, Jihyun Bae, Bongsu Shin, Jong G. Ok, Ilsun Yoon, Sunghoon Lee, Jaeseung Chung, Sukgyu Hahm Country US Application# (Date) US 2016/0062132 (Aug 28, 2015) Registration# (Date) US 10007124 (Jun 26, 2018) Category Patents Link https://patents.google.com/patent/US10007124B2