Wide-field visible-light Fourier ptychographic microscopy for complex-signal inspection of a full-size EUV pellicle

Authors

J.-K. Choi, Y. T. Kim, J. G. Ok, and J. Hong

Journal

Journal of Micro/Nanopatterning, Materials, and Metrology (JM3)

Vol. (No.), pp.

Under review (Aug 2026)

Year

Under Review